Ultra high purity Gas Purifier/Purification System/Generator


Characteristics


● Two towers alternate adsorption regeneration, automatic continuous operation.
● EP class 316L polished stainless steel pipe fittings.
● Removal rate up to 99.9999999% with 0.003 m filter.
● Siemens PLC can be connected to DCS system.
● The security alarm function is perfect.
● Remote cloud service is available.
● Production and assembly in a super clean environment.
● Gas capacity 10-20000nm3 /h.

Gas Purifier


Table Parameters


Series modelsFor gasRaw gas indexProduct gas index
N2H2O2ArHeO2H2OCO2COCH4H2N2Granularity
9VV●●●●●5N≤0.1ppb≤0.1ppb≤0.1ppb≤0.1ppb—≤0.1ppb—0.003μm
9OVV●—●●●5N≤0.1ppb≤0.1ppb≤0.1ppb≤0.1ppb≤0.1ppb≤0.1ppb—0.003μm
9VVX———●●5N≤0.1ppb≤0.1ppb≤0.1ppb≤0.1ppb≤0.1ppb≤0.1ppb≤0.1ppb0.003μm
—●———≤0.1ppb≤0.1ppb≤0.1ppb≤0.1ppb≤0.1ppb—≤0.1ppb0.003μm
9X———●●5N≤0.1ppb≤0.1ppb≤0.1ppb≤0.1ppb≤0.1ppb≤0.1ppb≤0.1ppb0.003μm
—●———≤0.1ppb≤0.1ppb≤0.1ppb≤0.1ppb≤0.1ppb—≤0.1ppb0.003μm
Note: Common flow specifications：1-20000Nm3/h;Commonly used pressure：1-20Mpa